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Sapphire Wafer
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Company Profile
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Epistone Comp-Semi Materials., Co. Ltd.
[China]
Address:
B1 Shen Chang Gang Industry Park, 8 South 1st Rd, Baolong Industry Zone, Central Longgang, ShenZhen Shenzhen Guangdong 518118 China
Phone:
86-0755-89922158
Contact name:
Rebecca Zhang , Sales Manager
Epistone Comp-Semi Materials., Co. Ltd.
Products
Sapphire Wafer
Click to enlarge image
Origin
China
EPi-Ready Polished Sapphire Substrate
Crystal Materials
99.995% High Purity, 2-3 Grade Monocrystalline Al
2
O
3
Wafer Surface Orientation
C-axis(0001) offset to M (1-100) / A (11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25°
Diameter
50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.4mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm
Thickness
330um ± 10um
430um ± 10um
500um ± 15um
Major Flat
A-axis (1 1-2 0) ± 0.2°
Major Flat Length
16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm
Minor
None
Front Surface Finish
Epi polished, Ra< 0.20nm
Back Surface
SSP:
Fine ground, Ra 0.4 to 1.0um;
DSP:
Polished
Edge condition
Edge defects not to exceed SEMI M3-91
TTV
<15um
<10um
<10um
BOW
<15um
<10um
<10um
Warp
<15um
<10um
<10um
Bubble & Color
None by visual inspection in intensive light
Ground Boundary
None by visual inspection in fluorescent light
Cleanliness
Free visible contamination
Packaging
Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere.
Note
R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request.
Related Keywords:
sapphire wafer
,
sapphire substrates
,
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