Epistone Comp-Semi Materials., Co. Ltd.
[China]

Address:
B1 Shen Chang Gang Industry Park, 8 South 1st Rd, Baolong Industry Zone, Central Longgang, ShenZhen Shenzhen Guangdong 518118 China

Phone:
86-0755-89922158

Contact name:
Rebecca Zhang , Sales Manager

Epistone Comp-Semi Materials., Co. Ltd.

Click to enlarge image

Origin

China

EPi-Ready Polished Sapphire Substrate

Crystal Materials	99.995% High Purity, 2-3 Grade Monocrystalline Al2O3
Wafer Surface Orientation	C-axis(0001) offset to M (1-100) / A (11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25°
Diameter	50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.4mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm
Thickness	330um ± 10um	430um ± 10um	500um ± 15um
Major Flat	A-axis (1 1-2 0) ± 0.2°
Major Flat Length	16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm
Minor	None
Front Surface Finish	Epi polished, Ra< 0.20nm
Back Surface	SSP: Fine ground, Ra 0.4 to 1.0um; DSP: Polished
Edge condition	Edge defects not to exceed SEMI M3-91
TTV	<15um	<10um	<10um
BOW	<15um	<10um	<10um
Warp	<15um	<10um	<10um
Bubble & Color	None by visual inspection in intensive light
Ground Boundary	None by visual inspection in fluorescent light
Cleanliness	Free visible contamination
Packaging	Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere.
Note	R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request.